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发明名称
摘要
申请公布号	JP3601324(B2)	申请公布日期	2004.12.15
申请号	JP19980329309	申请日期	1998.11.19
申请人		发明人
分类号	H01L21/208;C30B15/00;C30B15/14;C30B15/20;C30B29/06;(IPC1-7):C30B29/06	主分类号	H01L21/208
代理机构		代理人
主权项
地址

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