A heating element CVD system wherein one or a plurality of connection terminal holders (6) is placed in the processing container, and each of the connection terminal holders (6) holds a plurality of connection terminals. Each of the connection terminals connects the heating element (3) to the electric power supply mechanism (30) electrically such that a connection region of the heating element (3) connected to the connection terminal is not exposed to a space in the processing container. <IMAGE>
申请公布号
EP1408535(A3)
申请公布日期
2004.12.15
申请号
EP20030256254
申请日期
2003.10.03
申请人
ANELVA CORPORATION;JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY