| 摘要 |
PURPOSE: To provide a method capable of rapidly forming an optical microopening adequate for a photomask and an opening for evanescent light in photomasks and near visual field optics in a low coat and short time. CONSTITUTION: A modulated laser beam is condensed to a mask layer 32 held by a lower transparent layer 31 and an upper transparent layer 33, by which the thickness of the condensing part of the mask layer 32 is irreversibly decreased and the light transmittance is increased and the optical opening 30 is formed. |
