HIGH K DIELECTRIC FILM AND METHOD FOR MAKING,申请号EP20030716529-传众专利搜索

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发明名称	HIGH K DIELECTRIC FILM AND METHOD FOR MAKING
摘要
申请公布号	EP1485941(A2)	申请公布日期	2004.12.15
申请号	EP20030716529	申请日期	2003.03.12
申请人	FREESCALE SEMICONDUCTORS, INC.	发明人	NGUYEN, BICH-YEN;ZHOU, HONG-WEI;WANG, XIAO-PING
分类号	H01L21/316;H01L21/28;H01L21/318;H01L21/336;H01L21/822;H01L21/8238;H01L21/8242;H01L21/8247;H01L27/04;H01L27/092;H01L27/108;H01L27/115;H01L29/51;H01L29/78;H01L29/786;H01L29/788;H01L29/792;(IPC1-7):H01L21/00	主分类号	H01L21/316
代理机构		代理人
主权项
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