| 摘要 |
Pressure sensor with an integrated structure comprising a support ( 33, 133, 233 ) and a silicon die ( 11 ), which lies substantially on the same plane as the upper surface ( 37, 137, 237 ) of the support and is integrated in a seat ( 34, 134, 234 ) made in the thickness of the support. On the inside face ( 23 ) of the die ( 11 ), in contact with the fluid the pressure of which has to be measured, is a protective layer. |
