发明名称 |
Wafer container cleaning system |
摘要 |
A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.
|
申请公布号 |
US6830057(B2) |
申请公布日期 |
2004.12.14 |
申请号 |
US20020286317 |
申请日期 |
2002.11.01 |
申请人 |
SEMITOOL, INC. |
发明人 |
DOLECHEK KERT;DAVIS JEFFRY |
分类号 |
B08B9/08;B08B9/28;H01L21/00;H01L21/673;(IPC1-7):B08B3/02 |
主分类号 |
B08B9/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|