发明名称 Wafer container cleaning system
摘要 A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.
申请公布号 US6830057(B2) 申请公布日期 2004.12.14
申请号 US20020286317 申请日期 2002.11.01
申请人 SEMITOOL, INC. 发明人 DOLECHEK KERT;DAVIS JEFFRY
分类号 B08B9/08;B08B9/28;H01L21/00;H01L21/673;(IPC1-7):B08B3/02 主分类号 B08B9/08
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