发明名称 Integrated circuit substrate having embedded wire conductors and method therefor
摘要 An integrated circuit substrate having embedded wire conductors provides high-density interconnect structure for integrated circuits. Wires are shaped to form a conductive pattern and placed atop a dielectric substrate layer. Additional dielectric is electro-deposited over the wires to form an insulating layer that encapsulates the wires. One or more power planes may be embedded within the substrate and wires within the conductive pattern may be laser-welded to vertical wire stubs previously attached to a power plane. Vias may be formed by mechanically or laser drilling (or plasma or chemical etching) through any power planes and screening a copper paste into the drilled holes to form conductive paths through the holes. Via conductors may then be exposed by a plasma operation that removes dielectric, leaving the ends of the via conductors exposed. Wires within the conductive pattern may then be laser-welded to the via conductor ends.
申请公布号 US6831371(B1) 申请公布日期 2004.12.14
申请号 US20020223747 申请日期 2002.08.19
申请人 AMKOR TECHNOLOGY, INC. 发明人 HUEMOELLER RONALD PATRICK;RUSLI SUKIANTO
分类号 H01L21/48;H01L23/498;H01L23/50;H05K1/05;H05K3/10;H05K3/28;H05K3/32;H05K3/40;(IPC1-7):H05K1/11;H01R12/04 主分类号 H01L21/48
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