METHOD FOR LUBRICATING MEMS COMPONENTS FOR PROTECTING PARTS RECEIVED IN ASSEMBLY FROM BEING CONTAMINATED BY IMPURITIES

摘要

PURPOSE: A method for lubricating MEMS components is provided to protect parts received in an assembly from being contaminated by impurities such as particles and vapor generated when manufacturing the assembly. CONSTITUTION: A method for lubricating MEMS components includes a step of mounting a MEMS device on an assembly substrate. An assembly lead is coupled to the assembly substrate in order to generate a MEMS assembly inner part for receiving the MEMS device. The MEMS device is coated by injecting coating agent through an opening. A mirror array(100) includes a semiconductor substrate(105) formed with plural MEMS mirrors(110). The mirror(110) formed on the MEMS array(100) reflects light while moving or rotating along at least one beam or hinge so as to modulate the light.