APPARATUS FOR SUPPLYING TREATMENT SOLUTION FOR PREVENTING ONE SOLUTION FROM MIXING IN OTHER SOLUTIONS AND APPARATUS FOR TREATING SUBSTRATE USING THE SAME

摘要

PURPOSE: An apparatus for supplying a treatment solution and an apparatus for treating a substrate using the same are provided to prevent one solution from mixing in other solution by using a draining unit for draining the solution. CONSTITUTION: An apparatus for supplying a treatment solution comprises a plurality of solution supply units(34,36), and a supply nozzle(31) for supply the mixing solutions comprising one and more solutions from the solution supply units. The solution supply units have outlet pipes(35,37) and the supply nozzle is connected to a supply pipe(32) for leading the mixing solutions to the supply nozzle. The outlet pipes are connected to the supply pipe by a check valve(33). The apparatus further comprises a draining unit(38) for draining the solution connected to at least on of the outlet pipes of the solution supply units.