LIQUID CRYSTAL DISPLAY SUBSTRATE AND ITS PRODUCTION

摘要

PURPOSE:To drastically reduce man-hours for the production by forming gate electrodes and their wiring layers out of a successive laminate including a gate layer and at least two layers, i.e., a gate insulating film and Si film and producing this laminate by etching using one mask. CONSTITUTION:The gate electrodes and wiring layer 12 connected to the gate electrodes of the liquid crystal display substrate constituted with drains 14 and sources 16A of TFTs by applying the voltage to the gate electrodes of TFTs at the time of applying voltages to pixel electrodes 16 are constituted of the successive laminate including the gate layer and at least two layers, i.e., the gate insulating film and the Si film and is formed by the etching using the one mask. Namely, the laminates structure of an Al layer, SiN layer a-Si layer and contact layer is formed successively from the glass substrate 10 side. This structure is etched by using the one mask to form the gate wirings 12. As a result, the constitution contg. the TFTs simultaneously with the gate wirings 12 is obtd. and the man-hours are decreased.