| 摘要 |
PURPOSE:To detect discharges other than a primary discharge, to prevent discharges which take place except at electrodes, and to enhance a laser oscillator in service life and reliability by a method wherein a discharge detecting electrode which detects a discharge except a primary discharge is provided adjacent to a discharge electrode inside the oscillator. CONSTITUTION:A primary discharge takes place between a high voltage side dielectric electrode 5 and a ground side dielectric electrode 7. A discharge voltage increases due to an air leakage in a chamber or after a long term shutdown of a laser oscillator, and when a discharge other than a primary discharge takes place, it is detected by a detecting electrode 17, which turns a switch OFF through a detection circuit 19 to turn an alternating current power supply 15 OFF to give an alarm. Therefore, a discharge taking place except at a discharge electrode is detected and prevented from occurring, whereby a laser oscillator can be enhanced in service life and reliability. An alternating power supply 15 can be decreased in output power by controlling through a detection signal transmission part 21. |
