NON-EVAPORABLE GETTER MULTILAYER DEPOSITS OBTAINED BY CATHODIC DEPOSITION AND PROCESS FOR THEIR MANUFACTURING

摘要

Disclosed are getter multilayers formed of at least a layer (12) of a non-evaporable getter alloy having a low activation temperature over a layer (11) of a different non-evaporable getter material having high specific surface, both obtained by cathodic deposition; the deposits of the invention show getter g as sorbing characteristics and activation temperature lower than those of deposits made up of a single material. The process for manufacturing these deposits i s also disclosed.