| 摘要 |
PROBLEM TO BE SOLVED: To realize an oscillating mirror which is oscillated at a stable and large oscillation angle independent of a change in ambient temperature or the like and has a two-step electrode structure having a high mechanical strength. SOLUTION: A second substrate 221 in which a second frame-shaped supporting part 222 and second driving electrodes 223 and 224 are integrated, is connected to a first substrate 200 in which a mirror substrate 201, torsion beams 202 and 203, a frame-shaped supporting part 204 and first driving electrodes 208 and 209 are integrated. The second driving electrodes 223 and 224 have thickness which satisfies the condition for effectively increasing a torsion angle. The second frame-shaped supporting part 222 has thickness to acquire a sufficient strength as a supporting part. COPYRIGHT: (C)2005,JPO&NCIPI
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