| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring system capable of easily measuring a shape, using a measuring instrument requiring focusing information, even when no focusing information such as a CAD data exists, and capable of precisely measuring a shape around an edge portion of a measuring object. SOLUTION: This shape measuring system 1 for measuring the shape of the measuring object has the first measuring means 2 for focusing light for measurement onto the measuring object to measure the shape of the measuring object, the second measuring means 4 for imaging the measuring object to measure the shape of the measuring object, a focusing information extracting means 16 for extracting information for focusing the light for the measurement from a shape data measured by the second measuring means, and a control means 18 for operating the first measuring means, based on the focusing information extracted by the focusing information extracting means. COPYRIGHT: (C)2005,JPO&NCIPI
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