| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring method and a surface shape measuring apparatus for improving precision and reducing processing time and improving angle measuring resolution for each angle of a surface to be measured to a reference during the measurement of the surface to be measured without requiring any advance control technique in a field for evaluating precision in a minute movable object and for evaluating operation performance accompanying the movement of production engineering, and optical application measuring fields. SOLUTION: In the method for measuring the surface shape of an object during operation by an interference method by irradiating an object to be measured that vibrates at one period with pulse light that is shorter than the vibration period of the object to be measured in synchronization, recording interference fringes generated between reflection light from the object to be measured and reference light, the timing of pulse light radiated to the object to be measured is adjusted to the vibration period of the object to be measured by a specific amount, the number of interference fringes in a direction being parallel to the vibration surface of the object to be measured is counted, inclination to the reference surface of the interference optical system of the object to be measured is obtained, and the surface shape of the object during operation and the inclination to the reference surface of the interference optical system are obtained simultaneously. COPYRIGHT: (C)2005,JPO&NCIPI
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