| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation system, improving operation efficiency, by smoothly removing reaction products, without causing any hindrance to operation, even if an auxiliary pump connected to a molecular pump becomes hot. SOLUTION: This evacuation system is composed of the molecular pump 1 having the suction side connected to a chamber, and ejectors 4 and 5 connected on the suction side to the exhaust side of the molecular pump 1. The ejectors 4 and 5 are interposed in a circulating pipe 27 for interposing product removing means 8a and 8b. The auxiliary pump is operated in the ejectors 4 and 5, by forcibly circulating carrier gas in the circulating pipe 27. COPYRIGHT: (C)2005,JPO&NCIPI
|
