| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability of a film on a mold surface and to prevent the coarsening of the mold surface even when a glass material is used as a mold base material. SOLUTION: A method for manufacturing a mold for shaping an optical element comprises forming a hard carbon film 16 on the shaping surface of the mold base material 12 having the shaping surface for shaping the optical element on its surface and formed from glass containing SiO<SB>2</SB>. The method for manufacturing the mold includes a first thin film forming process for forming a first thin film 13 made of SiO<SB>2</SB>on the shaping surface, a second thin film forming process for forming a second thin film 14 made of SiO<SB>x</SB>(0<x<2) on the first thin film 13, a third thin film forming process for forming a third thin film 15 made of Si on the second thin film 14, and a fourth thin film forming process for forming a hard carbon film 16 on the third thin film 15. COPYRIGHT: (C)2005,JPO&NCIPI
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