发明名称 |
TRANSPARENT CONDUCTIVE FILM FOR FLAT PANEL DISPLAYS |
摘要 |
Transparent conductive films for flat panel displays and methods for producing them are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film, the multi-layered conductive metallic film comprising two layers of an alloy selected from the group consisting of indium cerium oxide (InCeO) and indium tin oxide (ITO) surrounding a layer of an alloy of silver, palladium, and copper (Ag/Pd/Cu); and (3) collecting the composite film in continuous rolls. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising a multilayered film as described above formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 80% throughout the visible region; an electrical resistance of no greater than about 10 ohm/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the multi-layered metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test. |
申请公布号 |
WO2004042108(A3) |
申请公布日期 |
2004.12.09 |
申请号 |
WO2003US34642 |
申请日期 |
2003.10.31 |
申请人 |
AVERY DENNISON CORPORATION |
发明人 |
SASAKI, YUKIHIKO;HE, XIAO-MING |
分类号 |
C23C14/02;C23C14/08;C23C14/20;C23C28/00;G02F1/1333;G02F1/1343;H01L51/52 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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