PIEZOELECTRIC MOTOR AND METHOD OF EXCITING AN ULTRASONIC TRAVELING WAVE TO DRIVE THE MOTOR

摘要

A rotary ultrasonic piezoelectric motor is provided and a method of exciting a flexure traveling wave to drive the motor. The motor includes a stator having a piezoelectric ceramic disc polarized in the radial direction and bounded by a top electrode and a segmented bottom electrode. The motor also includes a power source for applying two pairs of alternating voltages to the bottom electrode segments to excite a shear-shear mode vibration in the stator, resulting in a shear-shear mode flexure traveling wave in the stator. The motor further includes a rotor operatively connected to the stator, and the stator is driven to rotate through a frictional force between the rotor and the stator due to the traveling wave deformation of the stator. A linear ultrasonic piezoelectric motor and method of exciting a flexure traveling wave to linearly drive the motor is provided. The motor includes a stator having a rectangular piezoelectric ceramic plate that is polarized in the longitudinal direction. The motor also includes a power source for applying two pairs of alternating voltages to the bottom electrode segments to excite a shear-shear mode vibration in the stator, resulting in a shear-shear mode flexure traveling wave in the stator. The motor further includes a slider operatively connected to the stator, and the stator is driven to move linearly through a frictional force between the slider and the stator due to the traveling wave deformation of the stator.