SHAPE VARIABLE MIRROR ELEMENT, METHOD FOR MANUFACTURING IT, SHAPE VARIABLE MIRROR UNIT AND OPTICAL PICKUP

摘要

PROBLEM TO BE SOLVED: To provide a shape variable mirror element and a shape variable mirror unit which are simple in configuration, very thin in thickness, and large in deformable amount even by low applied voltage.

SOLUTION: The shape variable mirror element is composed of a laminated film, which consists of: a reflection mirror film; a piezoelectric film for varying the shape of the reflection mirror film; an electrode film for applying specified voltage to both ends of the piezoelectric film; and elastic plate film changeable its shape into a desired shape. Since the shape variable mirror element is composed of a thin base plate and the laminated film, very thin element can be formed with a simple configuration. Thus, the shape variable mirror element large in deformable amount even by low applied voltage is provided.

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