| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element capable of making a conductive film have low resistance and enhancing its adhesion to a light scattering film, and its manufacturing method. SOLUTION: This bottom emission type organic EL element is provided with a plate-shaped substrate 10, a recessed and projecting scattering film 20 for a reflection type liquid crystal (called "light scattering film" hereafter) formed on the upper side surface of the substrate 10, an ITO film 30 formed on the upper side surface of the light scattering film 20, an organic EL laminated film 40 formed on the upper side surface of the ITO film 30, and an upper metal electrode 50 comprising a metal film formed on the upper side surface of the organic EL laminated film 40. The ITO film 30, the organic EL laminated film 40, and the upper metallic electrode 50 are laminated so as to have recessed and projecting shapes, respectively, along the recessed and projecting shape of the upper side surface of the light scattering film 20. The light scattering film 20 having a light scattering function is composed of a flat layer 404 comprising a film component D, and a plurality of projecting parts 405 comprising a film component C. The ITO film 30 is formed on the upper side surface of the light scattering film 20 by using an ion plating method. COPYRIGHT: (C)2005,JPO&NCIPI
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