发明名称 Method of surface treating a processing element in a processing system
摘要 The present invention presents a method of roughening one or more exposed surfaces on a processing element in order to improve the adhesion of materials on these surfaces during processing. The roughening procedure comprises the application of a belt sanding technique to these one or more exposed surfaces to produce an average surface roughness in excess of Ra=250 mil.
申请公布号 US2004245089(A1) 申请公布日期 2004.12.09
申请号 US20030454381 申请日期 2003.06.04
申请人 LAWSON JOHN 发明人 LAWSON JOHN
分类号 C23C14/56;C23C16/44;H01J37/32;(IPC1-7):C23C14/00;C23C14/32;C25D5/34;C23C16/00 主分类号 C23C14/56
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