WORK FEEDING DEVICE AND WORK STORING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a work feeding device and a work storing device which allow a mechanism to be simplified and miniaturized.

SOLUTION: In a loader device 3 taking out a substrate 9 from a pallet 14 and feeding it to a working device in a downstream side, a first step stacking portion 10A holding the pallets 14, and a second step stacking portion 10B are arranged in parallel in a Y direction. The taken out pallet 14 is moved in the Y direction by a pallet feeding table 18, and a transfer head 12 taking out the substrate from the pallet 14 on the pallet feeding table 18 and delivering that to the working device in the downstream side is moved in an X direction. Therefore, a moving mechanism relatively moving the transfer head 12 to the pallet 14 on two dimensional plane surface is simplified. The mechanism is simplified and made to be compact thereby.

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