发明名称 DISPLACEMENT MEASURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To enable highly precise origin detection superior in reproducibility. SOLUTION: Two-phase main signals A1 and B1 outputted from a detector 21 for a main track are supplied for an interpolating circuit 31 to generate two-phase interpolation main signals A1' and B1' having a phase difference corresponding to the pulse width of an origin pulse signal Z. Two-phase signals A2 and B2 for origin detection outputted from a detector 22 for a sub track are supplied for an interpolating circuit 32 to generate two-phase interpolation signals A2' and B2' for origin detection having a phase difference larger than the phase difference corresponding to the pulse width of the origin pulse signal. First and second interpolation pulse signals P1 and P2 interpolated in specific phase timings are generated from the interpolation signals A1', B1', A2', and B2', and the origin pulse signal Z is outputted when their phases are matched. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004347358(A) 申请公布日期 2004.12.09
申请号 JP20030142019 申请日期 2003.05.20
申请人 MITSUTOYO CORP 发明人 KIRIYAMA TETSUO
分类号 G01D5/244;G01D5/30;(IPC1-7):G01D5/30 主分类号 G01D5/244
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