| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device of a semiconductor device wherein a parasitic capacity between contacts of semiconductor switches used for switching a measuring terminal exerts little influence on measurement. SOLUTION: When the first semiconductor switches SW11-SW1n whose one ends are connected to measuring terminals CH1-CHn are opened, the second semiconductor switches SW21-SW2n connected to the same ends are closed, and potentials of the measuring terminals CH1-CHn are quickly conducted to a DUT power source potential VE through buffers A1-An and constant potential terminals CH11-CHn1. Hereby, the transient response time of a current flowing through parasitic capacities C11-C1n between the contacts of the first semiconductor switches SW11-SW1n from a measuring power source 2 at the rising time of a measuring power source potential VK is shortened, and the time necessary for electric characteristic measurement of a DUT 4 is shortened. COPYRIGHT: (C)2005,JPO&NCIPI
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