SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve the processing quality of substrates by sufficiently eliminating water contents in a load lock chamber. SOLUTION: The semiconductor manufacturing system is provided with: a reactor 2; the load lock chamber 1 located side by side to the reactor; a heat means 24 for heating the inner wall face of the load lock chamber; and a dehydrating apparatus 23 communicatively connected to the interior of the load lock chamber, sucking, transmitting and circulating a gas in the load lock chamber, and eliminating water vapor in the inside of the load lock chamber. COPYRIGHT: (C)2005,JPO&NCIPI