| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface processing machine in which the surface position of a material to be processed can be accurately detected with a simple constitution, and a surface processing method. SOLUTION: A detecting piezoelectric effect element 22 is provided on the lower side of a driving piezoelectric effect element 21. A voltage value of the detecting piezoelectric effect element 22 is changed by the piezoelectric effect when slightly compressed. Therefore, if the changes of the voltage value of the detecting piezoelectric effect element 22 are monitored, the position of the surface 9a of the material 9 to be processed can be detected when a processing tool 23 is brought into contact with the surface 9a of the material 9 to be processed by elongating the driving piezoelectric effect element 21. Such a detecting piezoelectric effect element 22, for example, can be expanded/contracted about 9μm to the full stroke. The detecting piezoelectric effect element 22, for example, is a laminated piezoelectric effect element which is formed by laminating a large number of thin piezoelectric effect films. The voltage changes can be observed with the compression of about 0.2-0.3μm as the whole element. COPYRIGHT: (C)2005,JPO&NCIPI
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