| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device which can do good washing by introducing a washing liquid into a manifold while the discharge of the washing liquid from a discharge slit is controlled with a die head fitted to a coating apparatus. SOLUTION: Circulating piping 22 and washing pump 23 are set in the manifold 5 of the die head 4 to form a closed loop passing through the manifold. A washing liquid tank 27 and a waste liquid tank 37 are connected to the circulating piping 22 through three-way valves 24 and 34. After coating, the washing liquid is supplied from the tank 27 into the piping 22, and residual coating liquid in the manifold 5 is discharged to the tank 37. After the piping 22 and the manifold 5 are filled with the washing liquid, the valves 24 and 34 are changed over to cut off communication to the outside to form a closed loop. The washing liquid is circulated at a high speed within the closed loop so that the manifold can be washed efficiently. COPYRIGHT: (C)2005,JPO&NCIPI
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