Method of fabricating metal-insulator-metal capacitor (MIM) using lanthanide-doped HfO2

摘要

Briefly, a preferred embodiment of the present invention includes a metal-insulator-metal (MIM) capacitor including a bottom layer of conductive material formed by depositing this conductive material on a substrate. A dielectric material is then formed on the bottom conductive layer, wherein the dielectric material is preferably an HfO2 dielectric doped with lanthamide material, more preferably Th doped HfO2 with a Th concentration in the range of 0 to 6% and more particularly substantially 4%. A top conductive layer is formed on top of the dielectric.