| 发明名称 |
Beam deflection device for scanning microscope has common rotation point for two mirror deflections at intercept of virtual rotation axis of one tilting mirror and real axis of other tilting mirror |
| 摘要 |
<p>The device has two tilting mirrors (1,2) for x and y deflection that rotate about 2 different axes (3,4). An optical device in the beam path (6) after one of the tilting mirrors forms a virtual image of the rotation axis of one mirror in a plane containing the rotation axis of the other mirror so that a common rotation point (10) for both deflections lies at the intercept of the virtual rotation axis (8) of one mirror and the real axis of the other mirror.</p> |
| 申请公布号 |
DE10322773(A1) |
申请公布日期 |
2004.12.09 |
| 申请号 |
DE2003122773 |
申请日期 |
2003.05.19 |
| 申请人 |
LEICA MICROSYSTEMS HEIDELBERG GMBH |
发明人 |
HOFFMANN, JUERGEN |
| 分类号 |
G02B21/00;G02B26/10;(IPC1-7):G02B21/00 |
主分类号 |
G02B21/00 |
| 代理机构 |
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