| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device with high productivity which can shorten a machining time by significantly improving a machining speed of holes in minute shapes. <P>SOLUTION: The laser beam machining device 10 is provided with a laser oscillator 11, an XY table 19 for laying sheet metal 21, and a machining optical system 12 (a beam scanner 13, a condensing lens unit 16, and an assist gas nozzle 17) for guiding the laser beam 22 on the surface of the sheet metal 21, and for condensing to a prescribed minute spot diameter on the surface. The XY table 19 is moved in the horizontal face so that the condensing position of the laser beam 22 comes to an arbitrary position on the surface of the sheet metal 21. The beam scanner 13 of the machining optical system 12 rotates each defecting mirror 14a, 14b by rotary motors 15a, 15b. It two-dimensionally scans the condensing position of the laser beam 22, which is positioned to an arbitrary position on the surface of the sheet metal 21, within a prescribed minute range on the surface of the sheet metal 21. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
