| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a display device capable of cleaning the surface of a spacer even in a state that a display panel is assembled by bonding a cathode base plate and an anode base plate. SOLUTION: In burn-in process F44 after successively carrying out a base plate bonding process F42 obtaining a display panel by bonding the cathode plate having a cathode electrode and the anode base plate having an anode electrode through a thin plate spacer, and an exhaust process F43 for vacuuming the inside of the display panel, electron beams are made generated from an emitter on the cathode electrode, and are made irradiated on the surface of the spacer, whereby the spacer is cleaned to remove stains, foreign matters, absorbed gas or the like adhered on its surface. COPYRIGHT: (C)2005,JPO&NCIPI
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