| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromechanical optical switch element having no dependency on wavelength of light, a simple structure, and a high ON/OFF contrast ratio of light. SOLUTION: The electromechanical optical switch element is composed by being provided with a supporting substrate having a first electrode, a thin film beam of a hollow structure having a second electrode which faces the first electrode and is supported on both ends of the supporting substrate, and a reflection plate which is erected on the thin film beam and reflects light, the thin film beam is attracted toward the first electrode side by electrostatic force by applying an electric voltage between the first and the second electrodes, and the reflection board on the thin film beam follows the thin film beam and moves toward the first electrode side to reflect or transmit the light which advances nearly in parallel to the supporting substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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