发明名称 PROCESS FOR FILING MICRO-BLIND VIAS
摘要 <p>The invention provides a process for filling µ-blind vias in the manufacture of printed circuit boards, which process comprises the following steps: (i) providing a bath electrolyte for galvanic plating with metallic coatings comprising a copper metal salt and optionally organic additives, (ii) operating the bath with direct current density of 0.5 to 10 A/dm&lt;2&gt;, or current pulses at an effective current density of 0.5 to A/dm&lt;2&gt;, (iii) withdrawing part of the electrolyte from the galvanic bath, (iv) adding an oxidizing agent to the part of the electrolyte which has been withdrawn, (v) optionally irradiating the withdrawn electrolyte with UV light and (vi) recycling the withdrawn part to the galvanic bath and replacing the organic additives destroyed by the oxidation treatment.</p>
申请公布号 WO2004107834(A1) 申请公布日期 2004.12.09
申请号 WO2004EP05874 申请日期 2004.06.01
申请人 ATOTECH DEUTSCHLAND GMBH;OEZKOEK, AKIF;ROELFS, BERND, OTTMAR;IGEL, OSWALD;GENTH, HERKO;MATEJAT, KAI-JENS 发明人 OEZKOEK, AKIF;ROELFS, BERND, OTTMAR;IGEL, OSWALD;GENTH, HERKO;MATEJAT, KAI-JENS
分类号 C25D21/18;H05K3/42;(IPC1-7):H05K3/42 主分类号 C25D21/18
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