发明名称 |
METHOD FOR MANUFACTURING UNEVEN SUBSTRATE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a simple manufacturing method for reducing the size of the texture of a crystal semiconductor substrate having an uneven structure for optical confinement on the surface. <P>SOLUTION: In the method for manufacturing the uneven substrate for forming the uneven structure by dipping the crystal semiconductor substrate 1 in an alkaline solution containing a surfactant and etching the surface of the substrate, an adhesive 2 is adhered in a dotted manner on the surface of the substrate 1 before dipping the substrate 1 in the alkaline solution. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2004349379(A) |
申请公布日期 |
2004.12.09 |
申请号 |
JP20030143183 |
申请日期 |
2003.05.21 |
申请人 |
HITACHI CABLE LTD |
发明人 |
MINAGAWA YASUSHI;TAKAHASHI TAKESHI |
分类号 |
H01L31/04;(IPC1-7):H01L31/04 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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