| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration-eliminating device in which a natural frequency in the horizontal direction becomes≤1 Hz without damaging the stability. SOLUTION: The vibration-eliminating device is so composed that the load 2 is supported by an air spring 1. A spherical member 3 is provided between a load disk 5, which supports the load 2, and the load 2. COPYRIGHT: (C)2005,JPO&NCIPI
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