ULTRA HIGH-SPEED MICRO DYNAMIC-PRESSURE BEARING AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ultra high-speed micro dynamic-pressure bearing capable of supporting the high-speed rotation of an impeller for a micro machine gas turbine and thrust force acting on the impeller and a method of manufacturing the bearing. SOLUTION: This ultra high-speed micro dynamic-pressure bearing 10 comprises a slender cylindrical portion 12 and a disk portion 14. A member symmetrical with respect to an axis is manufactured, and dynamic pressure generating grooves 12a and 14a are formed in the outer peripheral surface of the cylindrical portion 12 and both faces of the disk portion 14 in a cylindrical part groove forming step and a disk part groove forming step. In the cylindrical part groove forming step, after a photo resist is applied to the outer peripheral surface of the cylindrical portion 12, the cylindrical portion is rotated about an axis in a solvent steam. COPYRIGHT: (C)2005,JPO&NCIPI