| 摘要 |
PROBLEM TO BE SOLVED: To prevent deposition of reaction product in Roots pump. SOLUTION: Confluent passages 49, 51, 52, 53 are formed in a pump chambers 17 to 20. Passage surfaces 491 and 511 to 531 of the confluent passages 49, 51, 52, 53 are flat faces, and the flat passage surfaces 491 and 511 to 531 are inclined flat faces inclined downward from a front housing 12 side toward a rear housing 13 side. An exhaust passage 48 is formed in an end wall 16. An inlet 481 and an outlet 482 of the exhaust passage 48 are formed in the end wall 16. The confluent passages 49, 51, 52, 53 are connected with the inlet 481 of the exhaust passage 48, and neighboring pump chambers 17, 18, 19, 20, 21 mutually communicates through the exhaust passage 48 in the end wall 16. COPYRIGHT: (C)2005,JPO&NCIPI
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