发明名称 Indium-containing wafer and method for production thereof
摘要 An indium-containing wafer from which removal of mercury can be reliably performed and a method of manufacturing such a wafer are provided in order to make the mercury C-V method, allowing characteristics of a the indium-containing wafer to be measured with high precision and being a non-destructive test, viable. An indium-containing wafer relating to the present invention is characterized by having, formed on its episurface layer, an added-on mercury-removal layer directed to removing wafer-surface adherent mercury and composed of a compound semiconductor. In addition, a method of manufacturing an indium-containing wafer relating to the present invention is characterized in that after evaluating electrical characteristics of the wafer with, as an electrode, mercury adhered onto the surface of the mercury-removal layer, the superficially adhered mercury is eliminated by removing the mercury-removal layer.
申请公布号 US2004248385(A1) 申请公布日期 2004.12.09
申请号 US20040492694 申请日期 2004.04.12
申请人 TANAKA SO;IWASAKI TAKASHI 发明人 TANAKA SO;IWASAKI TAKASHI
分类号 H01L21/66;H01L21/02;H01L21/306;H01L21/322;H01L31/0304;H01L31/10;(IPC1-7):H01L21/322 主分类号 H01L21/66
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