发明名称 |
MICROELECTROMECHANICAL DEVICE PACKAGES WITH INTEGRAL HEATERS |
摘要 |
A microelectromechanical device package with integral a heater and a method for packaging the micro-electromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together. |
申请公布号 |
WO2004106221(A2) |
申请公布日期 |
2004.12.09 |
申请号 |
WO2004US14895 |
申请日期 |
2004.05.12 |
申请人 |
REFLECTIVITY, INC.;TARN, TERRY |
发明人 |
TARN, TERRY |
分类号 |
B81B7/00;G02B26/08;H01L23/10 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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