| 摘要 |
PROBLEM TO BE SOLVED: To provide load lock equipment which can convey a high temperature testpiece without deteriorating throughput. SOLUTION: The load lock equipment 1 carries out the testpiece from a treatment room side to an atmosphere side in the state where the pressure of the treatment room side is held to a prescribed value. The equipment is provided with a testpiece pass inbound way for carrying in a testpiece treatment-finished from the treatment room; a testpiece taking out way for carrying out the carried-in testpiece to an atmosphere side; a stage 6 which is provided with a testpiece retaining stand 3 on the upper part, and mounts the testpiece carried in through the testpiece inbound way for carrying in a testpiece; and a stage driving device for driving the stage at a position connected with the carrying-in way and a position connected with a carry-out way. The stage 6 is provided with a passage 7 for carrying out cooling medium for cooling a stage, and a valve V for intercepting connection of carrying-out pass and a carrying-in pass when the carrying-out pass is connected. The testpiece retaining stand 3 is provided with a recessed part 32 for carrying out the cooling medium on the upper surface. COPYRIGHT: (C)2005,JPO&NCIPI
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