| 摘要 |
PROBLEM TO BE SOLVED: To provide a silent discharge lamp having improved efficiency, capable of coping with large sized cleaning object and high speed conveyance, and an irradiation device using it. SOLUTION: In this silent discharge lamp having a non-circular cross section perpendicular to the axis of a discharge tube to emit excimer light, at least its one surface transmitting the excimer light is swelled to form a circular arc shape, and the thickness of a dielectric is thinned by increasing its strength against external pressure to improve efficiency of a lamp. This lamp and a reflection cylinder are disposed side by side, the advancing direction of useless light laterally emitted from the lamp is changed to the direction of an body to be irradiated and the irradiation device is structured so as to improve irradiation efficiency toward the body to be irradiated. COPYRIGHT: (C)2005,JPO&NCIPI
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