| 摘要 |
PROBLEM TO BE SOLVED: To realize compatibility between adjustment of a spring constant of a spring part by adjusting electrodes and prevention of sticking, in a capacity type acceleration sensor having the adjusting electrodes. SOLUTION: In the acceleration sensor, the spring part 22 connected to the base part of a semiconductor substrate 10 and deformed elastically in the Y-direction in response to application of the acceleration, a movable electrode 24 connected to the spring part 22, fixed electrodes 32, 42 arranged oppositely to the movable electrode 24, and the adjusting electrodes 50 for adjusting the spring constant of the spring part 22 are formed, and the applied acceleration is detected based on the interval change between the movable electrode 24 and the fixed electrodes 32, 42 at the acceleration application time. The spring part 22 has a pair of beams 22a, 22b facing along the Y-direction, and is elastically deformed so that the interval between the pair of beams is changed, and the adjusting electrodes 50 are provided respectively on the outside of one of the pair of beams and on the outside of the other, and an electrostatic force for separating mutually the pair of beams can be applied by the adjusting electrodes 50. COPYRIGHT: (C)2005,JPO&NCIPI |
