发明名称 SEMICONDUCTOR STORAGE DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor storage device that can be improved in manufacturing yield, and to provide a method of manufacturing the device. SOLUTION: The semiconductor storage device is provided with a memory cell 27 having a first ferromagnetic film 28, a tunnel barrier film 29 formed on the film 28, and a second ferromagnetic film 30 formed on the film 29. The device is also provided with a side-wall insulating film 40 formed to surround at least the side face of the second ferromagnetic film 30 and an interlayer insulating film 41 formed to cover the memory cell 27 and insulating film 40. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004349671(A) 申请公布日期 2004.12.09
申请号 JP20030207564 申请日期 2003.08.14
申请人 TOSHIBA CORP 发明人 FUKUZUMI YOSHIAKI
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L43/08;H01L43/12;(IPC1-7):H01L27/105 主分类号 H01L27/105
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