Handling device for positioning a test head holding an integrated circuit or wafer relative to a testing device, has a positioning mechanism that ensures exactly reproducible and smooth movement of the test head

摘要

Device comprises a holder (30) for a test head (40) and a column (10). Positioning means (20) are attached to the column to move the head in a vertical direction. The positioning means have at least one pair of interspaced articulated arms (21a, 22a), one end of which is hinged on the holder, while the other is articulated on a carriage which can be displaced in a horizontal direction. The articulated arms pivot about a vertical axis. The carriages (23a) can be moved independently of each other.