| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for sufficiently sealing a feeding/discharging line against external environment at a feeding/discharging port applied when an inside part of a container for storing a content such as FOUP or the like is purged. SOLUTION: A shape of a seal member 20 has a ring-shaped main body, an inner circumferential lip 20b protruded at an inner circumference of a ring at the main body and an outer circumferential lip 20c protruded from an outer circumference of the ring at the main body, and a space formed by the inner circumferential lip 20b and the outer circumferential lip 20c and the like can be purged. COPYRIGHT: (C)2005,JPO&NCIPI |
