METHOD FOR COLLECTING SUBSTANCE OF REVERSE SUBLIMATION NATURE, AND ITS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for efficiently collecting and recovering a high purity substance of reverse sublimation nature from a gas containing the substance of reverse sublimation nature on an industrial scale. SOLUTION: The method comprises passing the gas containing the substance of reverse sublimation nature through a tube of which the outer wall is controlled at a temperature suitable for separating and collecting the substance of reverse sublimation nature, depositing the substance of reverse sublimation nature on the inner wall of the tube and separating the deposit by transferring a plug-like body with pressure. COPYRIGHT: (C)2005,JPO&NCIPI