SLIT PLATE AND OPTICAL MICROSCOPE EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a method by which a very small quantity of coarse particles contained in a minute particle group having an average grain size within a range of 0.5 to 10μm is detected and judged and its content is quantified. SOLUTION: A slit plate which is mounted on an optical irradiation device of an optical microscope and is used for irradiation with reverse slit light is constituted of an outer peripheral section having an opened central part and a light shielding section which is fixed to or is suspended from the outer peripheral section through a center or a vicinity of an opened part located inside the outer peripheral section. COPYRIGHT: (C)2005,JPO&NCIPI