| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro device capable of switching an optical path by low loss. SOLUTION: Thermal oxide films 52 are formed on function surfaces 26a and 26b by oxidizing functional elements 26 worked by reactive ion etching (RIE). The thermal oxide films 52 are removed by hydrogen fluoride (HF) water to expose the function surfaces 26a and 26b worked on a mirror surface. COPYRIGHT: (C)2005,JPO&NCIPI |
