| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent gas-barrier film having high transparency together with superior oxygen impermeability and steam impermeability, which is manufactured in a film-forming apparatus for forming a gas-barrier layer on the film of a plastic substrate, and to provide a vacuum film-forming apparatus for manufacturing the gas-barrier film. SOLUTION: The vacuum film-forming apparatus comprises sections for unwinding and winding a web-shaped plastic substrate; a film-forming section comprising a film-forming chamber having a function of controlling the degree of vacuum, and an electrode for plasma CVD installed in the film-forming chamber; and a drum provided with a temperature-controlling device having a temperature-controlling function for measuring and controlling the temperature of a film surface during film formation. The method for forming the transparent gas-barrier film having the gas impermeability on at least one surface of the above plastic substrate by using the above vacuum film-forming apparatus comprises; keeping the film-forming chamber to a predetermined vacuum atmosphere; and controlling the temperature of the plastic substrate which is being film-formed, into a temperature range within±30% of the glass transition point (Tg) of the plastic substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
